A two-dimensional nano-positioner: Design, modelling and experiments-Reference-Cited by-同舟云学术

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A two-dimensional nano-positioner: Design, modelling and experiments

Published:2017-12 Issue: Volume:48 Page:167-173
ISSN:0736-5845
Container-title:Robotics and Computer-Integrated Manufacturing
language:en
Short-container-title:Robotics and Computer-Integrated Manufacturing

Author:

Dong Wei,Chen Fangxin,Li Haiyang,Yang Miao,Du Zhijiang

Funder

National Natural Science Foundation of China

Natural Science Foundation of Heilongjiang Province

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,General Mathematics,Software,Control and Systems Engineering

Reference20 articles.

1. Z. Wang, L. Chen, L. Sun, An integrated parallel micromanipulator with flexure hinges for optical fiber alignment, in: Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, Harbin, China, 5-8 August 2007, pp. 2530–2534.

2. Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: an analytical approach;Wadikhaye;Micro Nano Lett.,2012

3. A piezo-actuated high-precision flexible parallel pointing mechanism: conceptual design, development, and experiments;Du;IEEE Trans. Robot.,2014

4. High-performance surface-micromachined inchworm actuator;De Boer;Micro. Syst. J.,2004

5. Piezoelectric friction-inertia actuator - A critical review and future perspective;Zhang;Int. J. Adv. Manuf. Technol.,2012

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