Data-driven online detection of tip wear in tip-based nanomachining using incremental adaptive support vector machine

Author:

Cheng Fei,Dong Jingyan

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference42 articles.

1. Material-insensitive feature depth control and machining force reduction by ultrasonic vibration in AFM-based nanomachining;Zhang;IEEE Transactions on Nanotechnology,2013

2. High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope;Zhang;Nanotechnology,2013

3. Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist;Geng;Appl Surf Sci,2015

4. Development and characterization of ultrasonic vibration assisted nanomachining process for three-dimensional nanofabrication;Deng;IEEE Transactions on Nanotechnology,2018

5. Study of tip wear for AFM-based vibration-assisted nanomachining process;Kong;Journal of Manufacturing Processes,2020

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2. Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning;Microsystems & Nanoengineering;2023-10-10

3. Online Tip Damage Diagnosis of Atomic Force Microscope Based on Statistical Pattern Recognition;Journal of Vibration Engineering & Technologies;2023-08-25

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