PECVD technology deposition of high hardness a-C:H films on micro-drill surfaces: Substrate bias voltage effects-Reference-Cited by-同舟云学术

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PECVD technology deposition of high hardness a-C:H films on micro-drill surfaces: Substrate bias voltage effects

Published:2024-08 Issue: Volume:124 Page:385-398
ISSN:1526-6125
Container-title:Journal of Manufacturing Processes
language:en
Short-container-title:Journal of Manufacturing Processes

Author:

Ren Beibei,Su Yifan,Lou Jia,Zhang Cheng,Tang Peng,Lin Songsheng,Dai Mingjiang,Zhou Kesong

Funder

Scientific Research Foundation of Hunan Provincial Education Department

Tip-top Scientific and Technical Innovative Youth Talents of Guangdong Special Support Program

Department of Science and Technology of Guangdong Province

Publisher

Elsevier BV

Reference47 articles.

1. Cyber-physical systems for end-of-life management of printed circuit boards and mechatronics products in home automation: a review;Patil;Sustain Mater Technol,2022

2. Optimization and evaluation of a three-step pretreatment process for PCB microdrills;Zhang;Int J Refract Met Hard Mater,2023

3. Nanoscale surface compositions and structures of plasma-modified poly (ethylene terephthalate) thin films;Reddy;J Phys Chem C,2021

4. Preparation and properties of SnSb/C/DLC nanofibers with different precursors based on AP-PECVD;Yan;Fullerenes Nanotubes Carbon Nanostruct,2022

5. Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti6Al4V substrate;Almeida;Mater Res Express,2020

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