Author:
Kasim Johnson,Reichel Carsten,Dilliway Gabriela,Bai Bo,Zakowsky Nadja
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
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3. Sidewall Dislocations in Embedded SiGe Source/Drain Areas of MOSFETs and Their Impact on the Device Performance
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