Effects of 72Ge/74Ge preamorphization combined with sub-keV boron implantation in pMOSFET fabrication

Author:

Chen Lu-Chang,Chen Shang-Fu,Wu Meng-Chyi

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Chan STH, Benistant F, Al-Bayati A. In: Conference on ion implantation technology, New Mexico, USA; 2002. p. 69.

2. Modeling of the transient enhanced diffusion of boron implanted into preamorphized silicon

3. Xu Q, Qian H, Yin H, Jia L, Ji H. In: Proceedings of sixth international conference on solid-state and integrated-circuit technology, Shanghai, China; 2001. p. 68.

4. Adachi K, Ohuchi K, Toyoshima Y. In: The IWJT 2nd international workshop on junction technology, Tokyo, Japan; 2001. p. 35.

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