Modeling and system-level simulation of a CMOS convective accelerometer-Reference-Cited by-同舟云学术

Modeling and system-level simulation of a CMOS convective accelerometer

Published:2007-11 Issue:11-12 Volume:51 Page:1609-1617
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

Leman O.,Chaehoi A.,Mailly F.,Latorre L.,Nouet P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference12 articles.

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3. Leung AM, Jones J, Czyzewska E, Chen J, Woods B. Micromachined accelerometer based on convection heat transfer. In: Proc IEEE MEMS’98, Heidelberg, Germany, 25–29 January; 1998. p. 627–30.

4. Micromachined convective accelerometers in standard integrated circuits technology;Milanovic;Appl Phys Lett,2000

5. An optimized micromachined convective accelerometer with no proof mass;Luo;J Michromech Microeng,2001

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