Novel analytical model for optimizing the pull-in voltage in a flexured MEMS switch incorporating beam perforation effect

Author:

Guha K.,Laskar N.M.,Gogoi H.J.,Borah A.K.,Baishnab K.L.,Baishya S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Roy AL, Bhattacharya A, Chaudhuri RR, Bhattacharyya TK. Analysis of the pull-in phenomenon in microelectromechanical varactors. In: Proceedings of the 25th international conference on VLSI design, January 2012, Hyderabad, India.

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3. The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting;Park;J Micromech Microeng,2008

4. Rebeiz Gabriel M. RF MEMS theory, design and technology. John Wiley & Sons Publication; 2003.

5. Analysis and simulation of serpentine suspensions for MEMS applications;Bedier;Int J Mater Sci Eng,2013

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