1. 30nm physical gate length CMOS transistors with 1.0ps n-MOS and 1.7ps p-MOS gate delays;Chau;IEDM Tech Dig,2000
2. 45-nm gate length CMOS technology and beyond using steep halo;Wakabayashi;IEDM Tech Dig,2000
3. High performance 25nm gate CMOSFETs for 65nm node high speed MPUs;Goto;IEDM Tech Dig,2003
4. Ultra-low thermal budget CMOS process for 65nm-node low-operation-power applications;Ootsuka;IEDM Tech Dig,2003
5. A conventional 45nm CMOS node low-cost platform for general purpose and low power applications;Boeuf;IEDM Tech Dig,2004