Gold and platinum as ozone sensitive layer in work-function gas sensors-Reference-Cited by-同舟云学术

Gold and platinum as ozone sensitive layer in work-function gas sensors

Published:2001-12 Issue:3 Volume:80 Page:174-178
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Zimmer M.,Burgmair M.,Scharnagl K.,Karthigeyan A.,Doll T.,Eisele I.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. T. Doll, B. Flietner, I. Eisele, German Patent DE 4239319 (1992).

2. A. Fuchs, T. Doll, M. Bögner, I. Eisele, Design and fabrication of HSGFET gas sensors, in: Proceedings of the Microsystem Technologies ’96, Vols. 17–19, 1996, pp. 140–145.

3. Reliable hybrid GASFETs for work-function measurements with arbitrary materials;Flietner;Sens. Actuators B,1994

4. B. Flietner, T. Doll, J. Lechner, I. Eisele, Adsorption induced gas transport phenomena in narrow channels recorded with work-function detectors, J. Vac. Sci. Technol. A 14 (2) (1996).

5. A. Fuchs, T. Doll, I. Eisele, Flip–chip mounting of hybrid FET gas sensors with air gap, in: Proceedings of the Microsystems Technologies ’98, Potsdam.

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