Author:
Rombach Pirmin,Müllenborn Matthias,Klein Udo,Rasmussen Kurt
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Micromachined double backplate differential capacitive microphone;Bay;J. Micromech. Microeng.,1999
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