Author:
Fujitsuka Norio,Sakata Jiro
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Y. Matsumoto, M. Iwakiri, H. Tanaka, M. Ishida, T. Nakamura, A capacitive accelerometer using SDB-SOI structure, in: Proceedings of the Eighth International Conference on Solid-State Sensors and Actuators and Eurosensors IX, 1995, pp. 550–553.
2. Comparative evaluation of drying techniques for surface micromachining;Kim;Sens. Actuat. A,1998
3. G.T. Mulhern, D.S. Soane, R.T. Howe, Supercritical carbon dioxide drying of microstructures, in: Proceedings of the Seventh International Conference on Solid-State Sensors and Actuators, 1990, pp. 296–299.
4. Photoresist-assisted release of movable microstructures;Kobayashi;Jpn. J. Appl. Phys.,1993
5. Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal;Lee;Sens. Actuat. A,1998
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