Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)-Reference-Cited by-同舟云学术

Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)

Published:2001-04 Issue:3 Volume:89 Page:222-241
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gongora-Rubio M.R.,Espinoza-Vallejos P.,Sola-Laguna L.,Santiago-Avilés J.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference47 articles.

1. S.R. Wegeng, et al., Chemical System miniaturization, in: Proceedings of the 1996 Spring National Meeting of the American Institute of Chemical Engineers, 25–29 February 1996.

2. Darpa Programs, http://www.darpa.gov.

3. F.H. Norton, Cerâmica fina, tecnologia e aplicações, Edições OMEGA S.A, Barcelona, 1988.

4. Co-fired ceramic multilayers: when reliability counts;Keeler;Electro. Pkg. Prod.,1987

5. P. Gravesen, et al., Microfluidics, J. Micromech. Microeng. 3 (1993) 168–182.

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