Initial development of the lateral hillock distribution in optical quality Al thin films studied in real time
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Real-time study of migration in aluminum films by means of subÅngström-sensitive scattering and profiling methods
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3. Stress relaxation in thin aluminium films
4. Stress relaxation and hillock growth in thin films
5. The Effect of Grain-Specific Texture on Hillock Growth in Al-1%Si Films on SiO2/Si Substrates
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