Author:
Adachi John Y,McIntosh Bob C,Badt Dave E
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference15 articles.
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4. Fluorine distributions in a chemical vapor deposited tungsten silicide/polycrystalline silicon composite gate structure
5. Effect of fluorine in chemical‐vapor‐deposited tungsten silicide film on electrical breakdown of SiO2film
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