Author:
Wu Fan,McLaurin Allen W.,Henson Kirk E.,Managhan Doug G.,Thomasson Samuel L.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. S. Wolf, Silicon Processing for the VLSI, Vol. 2, Lattice Press, Sunset Beach, 1990.
2. Thin Film Components and Circuits, in The Physics of Thin Films;Schwartz;Vol. 2,1964
3. L. Maissel, in: L. Maissel, R. Glang (Eds.), Handbook of Thin Film Technology, McGraw-Hill, New York, 1970, p. 18.
4. Resistivity and Structure of Cr–SiO Cermet Films
5. Electrical Conduction Mechanism in Ultrathin, Evaporated Metal Films
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