Author:
Ki Kim Sung,Il Cho Se,Jin Choi Young,Sik Cho Kyu,Pietruszko S.M,Jang Jin
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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4. S.P. Murarka, Metallization: Theory and Practice for VLSI and ULSI, Butterworth–Heinemann, Boston, MA, 1993, Chapter 2.
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