Characterisation of ZrO2 films prepared by rf reactive sputtering at different O2 concentrations in the sputtering gases
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference18 articles.
1. Structural and optical properties of zirconia thin films
2. Structure-related bulk losses in ZrO2 optical thin films
3. Evolution of Optical Thin Films by Sputtering
4. Characterization of r.f.-sputtered zirconia coatings
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