Modification of zirconium oxide film microstructure during post-deposition annealing
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference34 articles.
1. Optical inhomogeneity and microstructure of ZrO_2 thin films prepared by ion-assisted deposition
2. Reaction steps of silicidation in ZrO2/SiO2/Si layered structure
3. Zirconia as a ceramic biomaterial
4. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
5. Protective dielectric coatings produced by ion-assisted deposition
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1. ALD Zirconium Oxide (ZrO2) Thin Films Mechanical/Structural Properties for High-Tech Applications;ECS Journal of Solid State Science and Technology;2015
2. High-rate reactive magnetron sputtering of zirconia films for laser optics applications;Applied Physics A;2014-01-17
3. Formation and Characterization of Ceramic Nanocomposite Crystalline Coatings on Aluminium by Anodization;Journal of Materials Science & Technology;2013-07
4. Tetragonal to monoclinic phase transition observed during Zr anodisation;Journal of Solid State Electrochemistry;2012-09-22
5. Modification of laser induced damage threshold of ZrO2 thin films by using time–temperature gradient annealing;Applied Surface Science;2012-01
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