Hot Langmuir probe measurements in a chemically reactive plasma and accurate evaluation of the electron energy distribution function-Reference-Cited by-同舟云学术

Hot Langmuir probe measurements in a chemically reactive plasma and accurate evaluation of the electron energy distribution function

Published:1998-10 Issue:2 Volume:51 Page:89-97
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Popov Ts,Petkov I

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference29 articles.

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2. Plasma characterization and process control diagnostics

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4. Computer calculation of neutral–radical densities in a CF4 electron cyclotron resonance plasma processing system

5. Ivanov, Yu. A., Lebedev, Yu. A. and Polak, L. S., Methods of Contact Diagnostics of Nonequilibrium Plasma Chemistry. Moscow, Nauka, 1981, (in Russian).

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