Effect of preparation conditions on pinhole defect of TiN films by ion mixing and vapor deposition-Reference-Cited by-同舟云学术

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Effect of preparation conditions on pinhole defect of TiN films by ion mixing and vapor deposition

Published:2002-05 Issue:3-4 Volume:65 Page:555-561
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Uchida H.,Yamashita M.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference12 articles.

1. Surface modification by Ion Beam Assisted Deposition.

2. Crystalline orientation control by the IVD method

3. Sugimoto K. Proceedings of the 95th Corrosion Symposium on Defect Evaluation of Corrosion-resistant Dry Coating Film. JSCE, Tokyo, 1993. p. 1–11 [in Japanese].

4. A study of the corrosion behavior of TiN films

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