Author:
Abdul-Wahed Ahmed M.,Roy Anindya L.,Xiao Zhiming,Takahata Kenichi
Funder
Natural Sciences and Engineering Research Council of Canada
Canada Foundation for Innovation
British Columbia Knowledge Development Fund
Canada Research Chairs program
Subject
Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites
Reference24 articles.
1. Direct writing of thin and thick metal films via micro glow plasma scanning;Abdul-Wahed;IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS 2016),2016
2. 3D high aspect ratio, MEMS integrated micro-solenoids and helmholtz micro-coils;Badilita;15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015),2009
3. Atmospheric pressure microplasma jet as a depositing tool;Benedikt;Appl. Phys. Lett.,2006
4. Effect of deposition rate on structure and surface morphology of thin evaporated al films on dielectrics and semiconductors;Bordo;Mater. Sci.,2012
5. Laser deposition and direct-writing of thermoelectric misfit cobaltite thin films;Chen;Appl. Phys. Lett.,2014
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