Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: effects of hydrogenating-gas and thermal history
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference23 articles.
1. Surface Hydrogen Desorption as a Rate-Limiting Process in Silane Gas-Source Molecular Beam Epitaxy
2. High Quality Silicon Epitaxy at 500°C using Silane Gas-Source Molecular Beam Technique
3. Effects of Adsorption Kinetics on the Low-Temperature Growth-Rate Activation Energy in Si Gas-Source Molecular Beam Epitaxy
4. New Mechanism for Hydrogen Desorption from Covalent Surfaces: The Monohydride Phase on Si(100)
5. Hydrogen desorption from the monohydride phase on Si(100)
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1. Infrared Spectroscopic Study of Hydrogenation Process of Si(100) Surface During Hydrogen Plasma Exposure;IEEE Transactions on Plasma Science;2016-12
2. Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry;IEEE Transactions on Plasma Science;2013-08
3. Kinetics of hydrogen adsorption and desorption on Si(100) surfaces;Journal of Applied Physics;2013-06-21
4. Diffusion-promoted-desorption mechanism for D2 desorption from Si(100) surfaces;Surface Science;2011-01
5. Adsorption and Desorption Barriers in Hydrogen Reactions on Si(100) Surfaces: Is the Barrier Puzzle Solved?;Journal of the Vacuum Society of Japan;2010
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