Adsorption of methylsilane on copper surfaces
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference28 articles.
1. Preparation and characterization of amorphous SiC:H thin films
2. Preparation of SixCyHz films from methylsilane by plasma-enhanced chemical vapor deposition
3. Kinetics of silicon carbide CVD: surface decomposition of silacyclobutane and methylsilane
4. Bonding and Thermal Reactivity in Thin a-SiC:H Films Grown by Methylsilane CVD
5. Role of the −SiH3 Functional Group in Silane Adsorption and Dissociation on Si(100)
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. References;Vibrational Spectra of Organometallics;2018-12-07
2. Hydrogen elimination from the dissociation of methyl-substituted silanes on tungsten and tantalum surfaces;Canadian Journal of Chemistry;2016-04
3. Formation of Methyl Radicals from Decomposition of Methyl-Substituted Silanes over Tungsten and Tantalum Filament Surfaces;The Journal of Physical Chemistry A;2013-08-02
4. X-ray photoelectron spectroscopy measurement of the Schottky barrier at the SiC(N)/Cu interface;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09
5. A RAIRS study of the adsorption and decomposition of methylsilane on Cu(111);Journal of Physics: Condensed Matter;2008-08-01
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