Chemical, morphological and nano-mechanical characterizations of Al2O3 thin films deposited by metal organic chemical vapour deposition on AISI 304 stainless steel-Reference-Cited by-同舟云学术

Chemical, morphological and nano-mechanical characterizations of Al2O3 thin films deposited by metal organic chemical vapour deposition on AISI 304 stainless steel

Published:2005-08 Issue:23 Volume:50 Page:4615-4620
ISSN:0013-4686
Container-title:Electrochimica Acta
language:en
Short-container-title:Electrochimica Acta

Author:

Natali M.,Carta G.,Rigato V.,Rossetto G.,Salmaso G.,Zanella P.

Publisher

Elsevier BV

Subject

Electrochemistry,General Chemical Engineering

Reference23 articles.

1. S. Ruppi, in: Proceedings of the EUROCVD 13, Athens, August 26–31, 2001, J. Phys. IV 11 (2001) 847.

2. Corrosion protection ability of Al2O3 coatings deposited with ion beam assisted deposition

3. Thermal barrier coatings

4. Effect of SiO2 intermediate layer on Al2O3/SiO2/n+-poly Si interface deposited using atomic layer deposition (ALD) for deep submicron device applications

5. Handbook of chemical vapour deposition;Pierson,1992

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