ZnO/quartz structure potentiality for surface acoustic wave pressure sensor-Reference-Cited by-同舟云学术

ZnO/quartz structure potentiality for surface acoustic wave pressure sensor

Published:2006-03 Issue:1 Volume:128 Page:78-83
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Talbi A.,Sarry F.,Elhakiki M.,Brizoual L. Le,Elmazria O.,Nicolay P.,Alnot P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Acoustic Wave Sensors: Theory, Design and Physicochemical Applications;Ballantine,1997

2. Surface acoustic wave sensors;White;IEEE. Ultrason. Symp.,1985

3. Surface acoustic wave microsensors and applications;Galipeau;Smart Mater. Struct.,1997

4. Developement of a SAW pressure sensor using stainless steel diaphragm;Dake;Solid-State Sens. Actuators,1991

5. Sezawa mode SAW pressure sensors based on ZnO/Si structure;Talbi;IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.,2004

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