Author:
Jeon Jin-Wan,Yoon Jun-Bo,Lim Koeng Su
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Chemical etching of silicon;Schwartz;J. Electrochem. Soc.,1976
2. Surface morphology of anisotropically etched single-crystal silicon;Shikida;J. Micromech. Microeng.,2000
3. Fabrication of out-of-plane curved surfaces in Si by utilizing RIE lag;Chou,2002
4. Investigation of gray-scale technology for large area 3D silicon MEMS structures;Waits;J. Micromech. Microeng.,2003
5. Microfabricated silicon solid immersion lens;Fletcher;J. Microelectromech. Syst.,2001
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