Electrically tunable surface micromachined Fabry–Perot interferometer for visible light-Reference-Cited by-同舟云学术

Electrically tunable surface micromachined Fabry–Perot interferometer for visible light

Published:2010-08 Issue:2 Volume:162 Page:184-188
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Blomberg M.,Kattelus H.,Miranto A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Fabry–Perot interferometers micomachined in silicon for use in optical fiber WDM systems;Jerman,1991

2. Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range;Correia;Sensors and Actuators A,1999

3. Surface micromachined tuneable interferometer array;Aratani;Sensors and Actuators A,1994

4. Electrically tuneable micromachined Fabry–Perot interferometer in gas analysis;Blomberg;Physica Scripta,1997

5. Miniaturised gas sensor on the basis of micromachined Fabry–Perot interferometer;Saari,2000

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