3D characterisation of piezoelectric bistable MEMS membranes during switching-Reference-Cited by-同舟云学术

3D characterisation of piezoelectric bistable MEMS membranes during switching

Published:2019-10 Issue: Volume:298 Page:111576
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Dorfmeister M.,Schneider M.,Schmid U.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. A bistable microrelay based on two-segment multimorph cantilever actuators;Sun;Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems,1998

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