Micromachined Pt–Rh and stainless steel relays for high power DC applications-Reference-Cited by-同舟云学术

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Micromachined Pt–Rh and stainless steel relays for high power DC applications

Published:2012-04 Issue: Volume:176 Page:130-137
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ozkeskin Fatih M.,Gianchandani Yogesh B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Bulk micromachined relay with lateral contact;Li;Journal of Micromechanics and Microengineering,2000

2. A thermomechanical relay with microspring contact array;Liu,2001

3. Laterally actuated multicontact MEMS relay fabricated using MetalMUMPS process: experimental characterization and multiscale contact modeling;Almeida;Journal of Micro/Nanolithography, MEMS, and MOEMS,2007

4. Review of radio frequency microelectromechanical systems technology;Lucyszyn;IEEE Science, Measurement & Technology,2004

5. RF MEMS: Theory, Design and Technology;Rebeiz,2003

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and manufacturing of an electrostatic MEMS relay for high power applications;Sensors and Actuators A: Physical;2021-04

2. Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers;Journal of Computational and Nonlinear Dynamics;2012-01-25

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