Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference32 articles.
1. A nanoelectromechanical systems optical switch driven by optical gradient force;Cai;Appl. Phys. Lett.,2013
2. D-band micromachined silicon rectangular waveguide filter;Zhao;IEEE Microw. Wirel. Compon. Lett.,2012
3. Robust MEMS gyroscope based on thermal principles;Bahari;J. Microelectromech. Syst.,2014
4. Robust micromachining of compliant mechanisms using silicides;Khosraviani;J. Micromech. Microeng.,2012
5. Theory, Design, and Technology;Rebeiz,2003
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