Author:
Wang Ren,Cheng Peng,Xie Fei,Young Darrin,Hao Zhili
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. A micromachined comb-drive tuning fork rate gyroscope;Bernstein,1993
2. Error sources in in-plane silicon tuning-fork MEMS gyroscopes;Weinberg;Journal of Microelectromechanical Systems,2006
3. Micromachined inertial sensors, invited paper;Yazdi;Proceedings of the IEEE,1998
4. W.A. Clark, Micromachined vibratory rate gyroscopes, Dissertation, University of California, Berkeley, 1997.
5. Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation;Geen;IEEE Journal of Solid-State Circuits,2002
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