Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing-Reference-Cited by-同舟云学术

Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Published:2009-11 Issue:1 Volume:156 Page:88-94
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Toy M. Fatih,Ferhanoglu Onur,Torun Hamdi,Urey Hakan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. CMOS-based thermal sensors;Akin,2005

2. Optomechanical uncooled infrared imaging system: design, microfabrication, and performance;Zhao;J. Microelectromech. Syst.,2002

3. Performance of uncooled microcantilever thermal detectors;Datskos;Rev. Scient. Instrum.,2004

4. Y. Zhao, Optomechanical uncooled infrared imaging system, Dissertation for the Degree of Doctor of Philosophy, University of California, Berkeley, Fall 2002.

5. Uncooled infrared imaging using bimaterial microcantilever arrays;Grbovic;Appl. Phys. Lett.,2006

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