High sensitivity, thermal noise-driven aluminum-based resonant MEMS humidity sensor

Author:

Gulsaran AhmetORCID,Azer Bersu Bastug,Saritas Resul,Kocer Samed,Shama Yasser S.,Rahmanian Sasan,Mouharrar Hamza,Abdelrahman Rana,Abdel-Rahman Eihab,Yavuz Mustafa

Funder

Mitacs

NSERC

CMC Microsystems

Publisher

Elsevier BV

Reference39 articles.

1. Sb-doped WO3 based QCM humidity sensor with self-recovery ability for real-time monitoring of respiration and wound;Li;Sensors Actuators B,2022

2. Superhydrophilic Cu (OH) 2 nanowire-based QCM transducer with self-healing ability for humidity detection;Lin;J. Mater. Chem. A,2019

3. Effects of operation temperature and reactant gas humidity levels on performance of PEM fuel cells;Ozen;Renew. Sustain. Energy Rev.,2016

4. Study of Temperature and Moisture Impact on Water Diffusion in Materials and on Electronic Circuits Failure Mechanisms;Cartailler,2021

5. Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies;Korotcenkov,2020

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