Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise-Reference-Cited by-同舟云学术

Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise

Published:2017-04 Issue: Volume:256 Page:66-76
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Le Shawn,Hegab Hisham

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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4. C. Cabuz et al. The dual diaphragm pump, Tech. Dig. MEMS 2001. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (Cat. No.01CH37090), pp. 519–522, 2001.

5. Miniature-scale Diaphragm Compressor for Electronics Cooling For;Sathe,2008

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