Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor

Author:

Dinh Thien Xuan,Ogami Yoshifumi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Fiber microcoil optical gyroscope;Scheuer;Optics Letters,2009

2. Micromachined inertial sensors;Yazdi;Proceedings of the IEEE,1998

3. Development of a dual axis thermal convective gas gyroscope;Dau;Journal of Micromechanics and Microengineering,2006

4. A principle to generate flow for thermal convective base sensors;Dinh;Journal of Fluids Engineering. Transactions of the American Society of Mechanical Engineers,2009

5. Nonlinear axisymmetric deformation of circular membrane under a rectangular-pulse load;Anik’ev;International Journal of Applied Mechanics and Engineering,1977

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