1. Stick-slip actuation of electrostatic stepper micropositioners for data storage – the μwalker;Patrascu,2005
2. Single crystal silicon (scs) xy-stage fabricated by DRIE and IR alignment;Lee,2000
3. A guided-wave optical switch controlled by a micro-electro-mechanical cantilever;Shubin,2000
4. Long-travel electrothermally driven resonant cantilever microactuators;Syms;J. Micromech. Microeng.,2002
5. Thermo-magnetic metal flexure actuators;Guckel,1992