Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration-Reference-Cited by-同舟云学术

Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration

Published:2018-02 Issue: Volume:270 Page:34-45
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Xu Qiu,Sun Bin,Li Yigui,Xiang Xiaojian,Lai Liyan,Li Jian,Ding Guifu,Zhao Xiaolin,Yang Zhuoqing

Funder

Hi-Tech Research and Development Program of China

Advanced Research Ministry of Education Joint Foundation

SJTU-SMC Young Scholar Program

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Design and characterization of inertial-activated electrical micro-switches fabricated and packaged using low-temperature photoresist molded metal-electroplating technology;Ma;J. Micromech. Microeng.,2003

5. A MEMS inertial switch with bridge-type elastic fixed electrode for long duration contact;Yang;IEEE Trans. Electron.,2008

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