Author:
Driesen M.,Ceyssens F.,Decoster J.,Puers R.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Analysis and design of polysilicon thermal flexure actuator;Huang;J. Micromech. Microeng.,1999
2. Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators;Noworolski;Sens. Actuators A,1996
3. A high force low area MEMS thermal actuator;Sinclair,2000
4. Fundamentals of Microfabrication;Madou,2000
5. Thermo-magnetic metal flexure actuators;Guckel,1992
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