Author:
Wong Lawrence L.P.,Na Shuai,Chen Albert I.,Li Zhenhao,Macecek Mirek,Yeow John T.W.
Funder
Natural Sciences and Engineering Research Council of Canada
Waterloo Institute for Nanotechnology
University of Waterloo
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Surface micromachined capacitive ultrasonic transducers;Ladabaum;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,1998
2. Fabricating capacitive micromachined ultrasonic transducers with a novel silicon–nitride-based wafer bonding process;Logan;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2009
3. Surface micromachined ultrasound transducers in CMOS technology;Eccardt,1996
4. Design and characterization of air coupled ultrasonic transducers based on MUMPs;Octavio,2006
5. Air-coupled linear and sparse cMUT array manufactured using MUMPs process;Octavio;Microsyst. Technol.,2011
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