A dual-drive mode MEMS device for in-situ static/dynamic electro-mechanical characterization of nanomaterials-Reference-Cited by-同舟云学术

A dual-drive mode MEMS device for in-situ static/dynamic electro-mechanical characterization of nanomaterials

Published:2022-11 Issue: Volume:347 Page:113953
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang Yuheng,Nie Meng,Wu Bozhi,Li Binghui,Yin Kuibo,Sun Litao

Funder

Natural Science Foundation of Jiangsu Province

Fundamental Research Funds for the Central Universities

Jiangsu Provincial Key Research and Development Program

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference39 articles.

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