Acoustically generated flows in microchannel flexural plate wave sensors: Effects of compressibility

Author:

Sayar Ersin,Farouk Bakhtier

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A 3D Numerical Approach for a Microchannel Flow Characteristics under an Acoustic Field;Proceeding of Proceedings of the 27th National and 5th International ISHMT-ASTFE Heat and Mass Transfer Conference December 14-17, 2023, IIT Patna, Patna-801106, Bihar, India;2024

2. Recent development and futuristic applications of MEMS based piezoelectric microphones;Sensors and Actuators A: Physical;2022-11

3. Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump;Journal of Micromechanics and Microengineering;2022-05-06

4. Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique;Microelectronic Engineering;2022-01

5. Piezoelectric Based MEMS Acoustic Sensor for Wide Frequency Applications;IEEE Sensors Journal;2021-12-15

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