Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography-Reference-Cited by-同舟云学术

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Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography

Published:2023-11 Issue: Volume:362 Page:114637
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kwon MinHee^ORCID,Ignat Ioan^ORCID,Platz Daniel^ORCID,Arthaber Holger^ORCID,Schmid Ulrich^ORCID

Funder

Horizon 2020 Framework Programme

Horizon 2020

Technische Universität Wien Bibliothek

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. SAW sensors;Buff;Sensors Actuators A,1992

2. Mechanical sensors based on surface acoustic waves;Seifert;Sensors Actuators A,1994

3. Surface Acoustic Wave Filters: With Applications to Electronic Communications and Signal Processing;Morgan,2010

4. Surface acoustic wave devices for sensor applications;Liu;J. Semicond.,2016

5. Surface acoustic wave (SAW) sensors: Physics, materials, and applications;Mandal;Sensors,2022

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advancements in One-Port Surface Acoustic Wave (SAW) Resonators for Sensing Applications: A Review;IEEE Sensors Journal;2024-06-01

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