Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

Author:

Trusov Alexander A.,Schofield Adam R.,Shkel Andrei M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Type I and type II micromachined vibratory gyroscopes;Shkel,2006

2. Error sources in in-plane silicon tuning-fork MEMS gyroscopes;Weinberg;J. Microelectromech. Syst.,2006

3. U.-M. Gomez, B. Kuhlmann, J. Classen, W. Bauer, C. Lang, M. Veith, E. Esch, J. Frey, F. Grabmaier, K. Offterdinger, T. Raab, H.-J. Faisst, R. Willig, R. Neul, New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications, in: Proc. International Solid-State Sensors, Actuators and Microsystems Conference TRANSDUCERS 2005, vol. 1, 2005, pp. 184–187 (doi:10.1109/SENSOR.2005.1496389)

4. A.A. Trusov, A.R. Schofield, A.M. Shkel, Study of substrate energy dissipation mechanism in in-phase and anti-phase micromachined vibratory gyroscopes, in: Proc. IEEE Sensors, 2008, pp. 168–171 (doi:10.1109/ICSENS.2008.4716410).

5. Micromachined inertial sensors;Yazdi;Proc. IEEE,1998

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