Pre-shaped buckled-beam actuators: Theory and experiments-Reference-Cited by-同舟云学术

Pre-shaped buckled-beam actuators: Theory and experiments

Published:2008-11 Issue:1 Volume:148 Page:186-192
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Park Seunghoon,Hah Dooyoung

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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4. On a tunable bistable MEMS-theory and experiment;Saif;IEEE J. Microelectromech. Syst.,2000

5. Bi-stable planar polysilicon microactuators with shallow arch-shaped leaf springs;Lee,1999

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