Author:
Tanaka Taishi,Kou You,Takahashi Tomokazu,Suzuki Masato,Aoyagi Seiji
Funder
Kansai University
Japan Society for the Promotion of Science
Reference36 articles.
1. A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material;Noda;Sens. Actuators A: Phys.,2006
2. K. Noda, K. Hoshino, K. Matsumoto and I. Shimoyama, 300nm-thick cantilever in PDMS for tactile sensing, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., Miami Beach, FL, USA, pp. 283-286, doi: 10.1109/MEMSYS.2005.1453922.
3. High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers;Thanh-Vinh;Sens. Actuators A: Phys.,2014
4. Piezoresistive cantilevers for nanomechanical sensing;Bausells;Microelectron. Eng.,2015
5. MEMS-based pulse wave sensor utilizing a piezoresistive cantilever;Nguyen;Sensors,2002