Electron optics for high throughput low energy electron microscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference14 articles.
1. An analytical reflection and emission UHV surface electron microscope
2. Imaging with a low-energy electron microscope
3. Trajectory displacement effect in particle projection lithography systems: Modifications to the extended two-particle theory and Monte Carlo simulation technique
4. Stochastic scattering in charged particle projection systems: A nearest neighbor approach
5. Electron–electron interactions in cathode objective lenses
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