Total reflection X-ray fluorescence of single and multiple thin-layer samples
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference22 articles.
1. Total reflection X-ray spectrometry: method and applications
2. Application of total reflection X-ray fluorescence in semiconductor surface analysis
3. Semiconductor Fabrication: Technology and Metrolog;Eichinger,1988
4. Grazing incidence X-ray fluorescence analysis
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