Author:
Jia Hujun,Yang Yintang,Chai Changchun,Li Yuejin,Zhu Zuoyun
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials,Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry,Spectroscopy
Cited by
1 articles.
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1. Growth and characterization of Si/SiN/SiC structures by APCVD process;2008 9th International Conference on Solid-State and Integrated-Circuit Technology;2008-10