Micro-crystalline phase formation in hot wire deposited Si:C:H alloy films from pure methane and silane mixtures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
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2. Amorphous-SiC thin-film p-i-n light-emitting diode using amorphous-SiN hot-carrier tunneling injection layers
3. Deposition of device quality, lowHcontent amorphous silicon
4. Deposition of device quality a-Si:H films with the hot-wire technique
5. Factors Influencing the Quality of a-Si:H Films Deposited by the “HOT WIRE” Technique
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4. Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study;Surface and Coatings Technology;2006-09
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