Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers-Reference-Cited by-同舟云学术

Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers

Published:2016 Issue: Volume:26 Page:27-34
ISSN:2212-0173
Container-title:Procedia Technology
language:en
Short-container-title:Procedia Technology

Author:

Klaas D.,Rein M.,Wurz M.C.,Rissing L.

Publisher

Elsevier BV

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference20 articles.

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3. Sensirion AG. CMOSens® - Core of Sensirion's Sensor Solutions. https://www.sensirion.com/en/technology/cmosensr-technology/, (15th Jan. 2016).

4. Humidity Sensors Principle;Farahani;Mechanism, and Fabrication Technologies: A Comprehensive Review. Sensors,2014

5. Klaas D. Direct deposition of ultrathin sensor systems onto components of arbitrary size. In: Denkena B, editor. Cross linked Production – Research Results for Industrial Application. PZH Verlag Garbsen 2015. ISBN: 978-3-95900-057-4, p. 8.

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